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1. (WO2018049147) MEMS ACTUATION SYSTEMS AND METHODS

Pub. No.:    WO/2018/049147    International Application No.:    PCT/US2017/050662
Publication Date: Fri Mar 16 00:59:59 CET 2018 International Filing Date: Sat Sep 09 01:59:59 CEST 2017
IPC: B81B 5/00
Applicants: MEMS DRIVE, INC.
Inventors: LIU, Xiaolei
NG, Matthew
WANG, Guiqin
Title: MEMS ACTUATION SYSTEMS AND METHODS
Abstract:
A micro-electrical-mechanical system (MEMS) actuator includes a first set of actuation fingers, a second set of actuation fingers, and a first spanning structure configured to couple at least two fingers of the first set of actuation fingers while spanning at least one finger of the second set of actuation fingers.