WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2018048124) GROUP 5 METAL COMPOUND, PREPARATION METHOD THEREFOR, FILM DEPOSITION PRECURSOR COMPOSITION COMPRISING SAME, AND FILM DEPOSITION METHOD USING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/048124    International Application No.:    PCT/KR2017/009188
Publication Date: 15.03.2018 International Filing Date: 23.08.2017
IPC:
C07F 9/00 (2006.01), H01L 21/28 (2006.01), H01L 21/285 (2006.01), H01L 21/02 (2006.01), C23C 16/18 (2006.01), C23C 16/455 (2006.01), C23C 16/40 (2006.01), C23C 16/34 (2006.01)
Applicants: UP CHEMICAL CO., LTD. [KR/KR]; (Chilgoe-dong), 81, Sandan-ro 197beon-gil, Pyeongtaek-si Gyeonggi-do 17749 (KR)
Inventors: HAN, Won Seok; (KR).
PARK, Myeong-Ho; (KR).
KIM, Dae-Young; (KR).
CHOI, Jun Hwan; (KR)
Agent: MAPS INTELLECTUAL PROPERTY LAW FIRM; (Yeoksam-dong, Handong Bldg.), 8F, 37, Teheran-ro 8-gil, Gangnam-gu Seoul 06239 (KR)
Priority Data:
10-2016-0115708 08.09.2016 KR
Title (EN) GROUP 5 METAL COMPOUND, PREPARATION METHOD THEREFOR, FILM DEPOSITION PRECURSOR COMPOSITION COMPRISING SAME, AND FILM DEPOSITION METHOD USING SAME
(FR) COMPOSÉ MÉTALLIQUE DU GROUPE 5, SON PROCÉDÉ DE PRÉPARATION, COMPOSITION DE PRÉCURSEUR DE DÉPÔT DE FILM LE COMPRENANT, ET PROCÉDÉ DE DÉPÔT DE FILM L'UTILISANT
(KO) 5족 금속 화합물, 이의 제조 방법, 이를 포함하는 막 증착용 전구체 조성물, 및 이를 이용하는 막의 증착 방법
Abstract: front page image
(EN)The present invention relates to: a novel group 5 metal compound; a preparation method for the group 5 metal compound; a group 5 metal-containing film deposition precursor composition comprising the group 5 metal compound; and a group 5 metal-containing film deposition method using the group 5 metal-containing film deposition precursor composition.
(FR)La présente invention concerne : un nouveau composé métallique du groupe 5 ; un procédé de préparation du composé métallique du groupe 5 ; une composition de précurseur de dépôt de film contenant du métal du groupe 5 comprenant le composé métallique du groupe 5 ; et un procédé de dépôt de film contenant un métal du groupe 5 utilisant la composition de précurseur de dépôt de film contenant du métal du groupe 5.
(KO)신규한 5족 금속 화합물, 상기 5족 금속 화합물의 제조 방법, 상기 5족 금속 화합물을 포함하는 5족 금속-함유 막 증착용 전구체 조성물, 및 상기 5족 금속-함유 막 증착용 전구체 조성물을 이용하는 5족 금속-함유 막의 증착 방법에 관한 것이다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)