WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2018048005) MASK PROTECTING MODULE, PELLICLE COMPRISING SAME, AND LITHOGRAPHY DEVICE COMPRISING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/048005    International Application No.:    PCT/KR2016/010478
Publication Date: 15.03.2018 International Filing Date: 20.09.2016
IPC:
G03F 7/20 (2006.01), G03F 1/00 (2006.01), H01L 21/027 (2006.01)
Applicants: IUCF-HYU(INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) [KR/KR]; 222, Wangsimni-ro Seongdong-gu Seoul 04763 (KR)
Inventors: AHN, Jinho; (KR).
KIM, Junghwan; (KR).
HONG, Seongchul; (KR)
Agent: CHOI, Naeyoon; (KR)
Priority Data:
10-2016-0117214 12.09.2016 KR
Title (EN) MASK PROTECTING MODULE, PELLICLE COMPRISING SAME, AND LITHOGRAPHY DEVICE COMPRISING SAME
(FR) MODULE DE PROTECTION DE MASQUE, PELLICULE COMPRENANT CELUI-CI, ET DISPOSITIF DE LITHOGRAPHIE COMPRENANT CELUI-CI
(KO) 마스크 보호 모듈, 이를 포함하는 펠리클, 및 이를 포함하는 리소그래피 장치
Abstract: front page image
(EN)A mask protecting module is provided. The mask protecting module comprise a frame and a membrane supported by the frame, and the membrane may comprise areas that are different from each other in terms of at least one selected from optical transmittance, heat transfer rate, and strength.
(FR)L'invention concerne un module de protection de masque. Le module de protection de masque comprend un cadre et une membrane supportée par le cadre, et la membrane peut comprendre des zones qui sont différentes les unes des autres en termes d'au moins un paramètre sélectionné parmi la transmission optique, le coefficient de transmission de chaleur et la résistance mécanique.
(KO)마스크 보호 모듈이 제공된다. 상기 마스크 보호 모듈은, 프레임(frame), 상기 프레임에 의해 지지되는 멤브레인(membrane)을 포함하되, 상기 멤브레인은, 광의 투과도, 열 전달율, 또는 강도 중에서 적어도 어느 하나가 다른 영역들을 포함할 수 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)