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1. (WO2018047626) PRESSURE SENSOR

Pub. No.:    WO/2018/047626    International Application No.:    PCT/JP2017/030222
Publication Date: Fri Mar 16 00:59:59 CET 2018 International Filing Date: Fri Aug 25 01:59:59 CEST 2017
IPC: G01L 19/06
G01L 9/00
Applicants: DENSO CORPORATION
株式会社デンソー
Inventors: KAWANO Shinji
川野 晋司
MAWATARI Kazuaki
馬渡 和明
Title: PRESSURE SENSOR
Abstract:
The pressure sensor according to the present invention detects the pressure of a pressure medium. The pressure sensor is provided with a sensor substrate (10) and a protective film (30). The sensor substrate has a recess (11) depressed relative to the periphery thereof, and a thin-walled part (12) having a smaller wall thickness than the periphery due to formation of the recess. The protective film is provided to at least a portion of a side surface (13) of the recess and to a bottom surface (14) of the recess, the bottom surface (14) being one surface of the thin-walled part, and the protective film suppresses adhesion of foreign matter included in the pressure medium. The recess in which the protective film is formed and the thin-walled part are disposed in the pressure medium, and the thin-walled part has the function of detecting the pressure of the pressure medium. Furthermore, the pressure sensor is provided with an adhesion prevention part (13a) exhibiting a lotus effect in a state in which a liquid repellent film having liquid repellent properties with respect to a liquid of the pressure medium is provided as the protective film on an irregularity provided to at least a portion of the side surface. Through this pressure sensor, a reduction in the precision of pressure detection can be suppressed.