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1. (WO2018046831) METHOD FOR THE TRANSPORTATION AND STORAGE OF A SEMICONDUCTOR PLATE IN A HERMETIC CONTAINER
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Pub. No.: WO/2018/046831 International Application No.: PCT/FR2017/052340
Publication Date: 15.03.2018 International Filing Date: 05.09.2017
IPC:
H01L 21/673 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
Applicants:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE [FR/FR]; 3 Rue Michel Ange 75794 PARIS CEDEX 16, FR
UNIVERSITE GRENOBLE ALPES [FR/FR]; 621 Avenue Centrale 38400 SAINT MARTIN D'HERES, FR
Inventors:
PELISSIER, Bernard; FR
Agent:
BLOT, Philippe; c/o Cabinet Lavoix 2 Place d'Estienne d'Orves 75441 Paris Cedex 9, FR
Priority Data:
165830007.09.2016FR
Title (EN) METHOD FOR THE TRANSPORTATION AND STORAGE OF A SEMICONDUCTOR PLATE IN A HERMETIC CONTAINER
(FR) PROCEDE DE TRANSPORT ET DE STOCKAGE D'UNE PLAQUE SEMICONDUCTRICE EN ENCEINTE HERMETIQUE
Abstract:
(EN) The invention relates to a method for the transportation and/or storage of at least one semiconductor plate, in which the plate is disposed in a hermetic container (1) filled with hydrogen at a pressure of between 10-1 and 4*103 Pa and, optionally, at least one inert gas, the total pressure in the casing being between 10-1 and 5*104 Pa.
(FR) L'invention concerne un procédé de transport et/ou de stockage d'au moins une plaque semiconductrice, dans lequel la plaque est disposée dans une enceinte hermétique (1) remplie d'hydrogène à une pression comprise entre 10-1 et 4*103 Pa et éventuellement d'au moins un gaz neutre, la pression totale dans la boîte étant comprise entre 10-1 et 5*104 Pa.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: French (FR)
Filing Language: French (FR)