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1. (WO2018043936) METHOD AND SYSTEM FOR SENSING FINE CHANGES IN PROCESSING/EQUIPMENT MEASUREMENT DATA

Pub. No.:    WO/2018/043936    International Application No.:    PCT/KR2017/008501
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Tue Aug 08 01:59:59 CEST 2017
IPC: G06Q 50/04
G06Q 10/06
G05B 19/418
Applicants: SK HOLDINGS CO., LTD.
에스케이 주식회사
Inventors: LEE, Byung Min
이병민
HONG, Tae Young
홍태영
SON, Myung Seung
손명승
Title: METHOD AND SYSTEM FOR SENSING FINE CHANGES IN PROCESSING/EQUIPMENT MEASUREMENT DATA
Abstract:
A method and a system for sensing fine changes in processing/equipment measurement data are provided. A data change sensing method according to an embodiment of the present invention extracts a part on the basis of a statistical distribution of reference data and comparison data, calculates a target range on the basis of a specification, and discriminates data, included in the target range, among the extracted reference data and comparison data so as to determine data changes. Therefore, fine changes in measurement data for processing or equipment can be sensed in a manufacturing process, thereby enabling pre-estimation of potential quality variability of products and quick preemptive actions for preventing quality degradation.