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1. (WO2018043516) ANTIREFLECTIVE FILM, OPTICAL ELEMENT, AND OPTICAL SYSTEM

Pub. No.:    WO/2018/043516    International Application No.:    PCT/JP2017/031034
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Wed Aug 30 01:59:59 CEST 2017
IPC: G02B 1/115
B32B 9/00
B32B 15/04
C23C 14/06
G02B 15/20
Applicants: FUJIFILM CORPORATION
富士フイルム株式会社
Inventors: UMEDA, Kenichi
梅田 賢一
NAKAMURA, Seigo
中村 誠吾
ITAI, Yuichiro
板井 雄一郎
YASUDA, Hideki
安田 英紀
Title: ANTIREFLECTIVE FILM, OPTICAL ELEMENT, AND OPTICAL SYSTEM
Abstract:
Provided is an antireflective film having high mechanical strength, high light transmittance, and high antireflective performance, an optical element provided with the antireflective film, and an optical system provided with the optical element. An antireflective film 1 obtained by layering an intermediate layer 3, a silver-containing metal layer 4 containing silver, and a dielectric layer 5 in this order on a substrate 2, an anchor region 7 including an oxide of an anchor metal being provided between the silver-containing metal layer 4 and the intermediate layer 3, a cap region 9 including an oxide of the anchor metal included in the anchor region 7 being provided between the silver-containing metal layer 4 and the dielectric layer 5, the crystal grain size calculated by X-ray diffraction measurement in the silver-containing metal layer 4 being less than 6.8 nm, and the anchor metal having a surface energy less than that of silver and greater than the surface energy of the layer of the intermediate layer 3 closest to the silver-containing metal layer 4.