Search International and National Patent Collections
|1. (WO2018043516) ANTIREFLECTIVE FILM, OPTICAL ELEMENT, AND OPTICAL SYSTEM|
|Title:||ANTIREFLECTIVE FILM, OPTICAL ELEMENT, AND OPTICAL SYSTEM|
Provided is an antireflective film having high mechanical strength, high light transmittance, and high antireflective performance, an optical element provided with the antireflective film, and an optical system provided with the optical element. An antireflective film 1 obtained by layering an intermediate layer 3, a silver-containing metal layer 4 containing silver, and a dielectric layer 5 in this order on a substrate 2, an anchor region 7 including an oxide of an anchor metal being provided between the silver-containing metal layer 4 and the intermediate layer 3, a cap region 9 including an oxide of the anchor metal included in the anchor region 7 being provided between the silver-containing metal layer 4 and the dielectric layer 5, the crystal grain size calculated by X-ray diffraction measurement in the silver-containing metal layer 4 being less than 6.8 nm, and the anchor metal having a surface energy less than that of silver and greater than the surface energy of the layer of the intermediate layer 3 closest to the silver-containing metal layer 4.