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1. (WO2018043423) ILLUMINATING OPTICAL SYSTEM, LITHOGRAPHY DEVICE, AND ARTICLE MANUFACTURING METHOD

Pub. No.:    WO/2018/043423    International Application No.:    PCT/JP2017/030779
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Tue Aug 29 01:59:59 CEST 2017
IPC: G03F 7/20
G02B 5/00
G02B 19/00
Applicants: CANON KABUSHIKI KAISHA
キヤノン株式会社
Inventors: SUDA Hiromi
須田 広美
Title: ILLUMINATING OPTICAL SYSTEM, LITHOGRAPHY DEVICE, AND ARTICLE MANUFACTURING METHOD
Abstract:
Provided is an illuminating optical system that illuminates, using light emitted from a light source, a surface to be illuminated. This illuminating optical system has: an optical integrator that is disposed between a light source and a surface to be illuminated; and an optical filter having an adjustment unit that adjusts the intensity of light to be inputted to the optical integrator. The optical integrator is a rod-type optical integrator that reflects inputted light by an internal surface. The illuminating optical system changes the position of the adjustment unit in the direction perpendicular to the optical axis of the illuminating optical system, thereby changing illuminance on the surface to be illuminated.