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1. (WO2018042897) STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

Pub. No.:    WO/2018/042897    International Application No.:    PCT/JP2017/025365
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Thu Jul 13 01:59:59 CEST 2017
IPC: H01J 37/20
B23Q 1/72
G12B 5/00
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: TAKAHASHI Motohiro
高橋 宗大
MIZUOCHI Masaki
水落 真樹
NAKAGAWA Shuichi
中川 周一
OGAWA Hironori
小川 博紀
KATO Takanori
加藤 孝宜
Title: STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Abstract:
The present invention relates to a charged particle beam device wherein a table deformation arising from the movement of a rolling element from a guide can be suppressed via a simple constitution. Provided in the sample stage containing a table (105) and a linear guide, which comprises a carriage (201), a rolling element, and a guide rail (202), is a distortion-insulating guide structure characterized by the connection between the carriage (201) and the table (105) being mediated by an adapter (401) that is an elastic deformable member. The invention also provides a stage using the guide structure and a charged particle beam device using the stage.