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|1. (WO2018042897) STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE|
|Applicants:||HITACHI HIGH-TECHNOLOGIES CORPORATION
|Title:||STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE|
The present invention relates to a charged particle beam device wherein a table deformation arising from the movement of a rolling element from a guide can be suppressed via a simple constitution. Provided in the sample stage containing a table (105) and a linear guide, which comprises a carriage (201), a rolling element, and a guide rail (202), is a distortion-insulating guide structure characterized by the connection between the carriage (201) and the table (105) being mediated by an adapter (401) that is an elastic deformable member. The invention also provides a stage using the guide structure and a charged particle beam device using the stage.