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1. (WO2018042808) LASER IRRADIATING DEVICE

Pub. No.:    WO/2018/042808    International Application No.:    PCT/JP2017/021216
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Thu Jun 08 01:59:59 CEST 2017
IPC: H01L 21/268
B65G 49/06
H01L 21/20
H01L 21/677
Applicants: THE JAPAN STEEL WORKS, LTD.
株式会社日本製鋼所
Inventors: SUZUKI Yuki
鈴木 祐輝
Title: LASER IRRADIATING DEVICE
Abstract:
In a laser irradiating device 1 according to one mode of the invention, each of first and second flotation units 30a, 30b has a base 31 and a porous plate 32 joined to the upper surface of the base 31 via an adhesive layer 34. The base 31 has, on at least an external peripheral edge thereof facing a gap, a raised portion 312 protruding upward. The porous plate 32 has a cut-out portion 321 mating with the raised portion 312. The adhesive layer 34 is formed along an inner wall of the raised portion 312 that has been mated with the cut-out portion 321.