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1. (WO2018042743) SUBSTRATE INSPECTION DEVICE, SUBSTRATE TREATMENT DEVICE, SUBSTRATE INSPECTION METHOD, AND SUBSTRATE TREATMENT METHOD

Pub. No.:    WO/2018/042743    International Application No.:    PCT/JP2017/013870
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Tue Apr 04 01:59:59 CEST 2017
IPC: H01L 21/027
G01N 21/956
H01L 21/66
Applicants: SCREEN HOLDINGS CO., LTD.
株式会社SCREENホールディングス
Inventors: KASHIYAMA, Masahito
柏山 真人
PIECZULEWSKI, Charles
ペチュレスキー チャー
MORITA, Akihiko
森田 彰彦
MATSUO, Tomohiro
松尾 友宏
Title: SUBSTRATE INSPECTION DEVICE, SUBSTRATE TREATMENT DEVICE, SUBSTRATE INSPECTION METHOD, AND SUBSTRATE TREATMENT METHOD
Abstract:
A substrate W is held by a rotating holding unit (252) such that the substrate can rotate. First image data indicating an image of the substrate is generated by picking up, at the time of performing first image pickup, the image of the substrate by means of an image pickup unit (1), said substrate being held by the rotating holding unit. After performing the first image pickup, the substrate is rotated by a predetermined angle by means of the rotating holding unit. Second image data indicating an image of the substrate is generated by picking up, at the time of performing second image pickup after rotating the substrate, the image of the substrate by means of the image pickup unit, said substrate being held by the rotating holding unit. On the basis of the first and second image data, whether there is a defective in the surface state of the substrate is determined.