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1. (WO2018042581) PATTERN MEASUREMENT DEVICE AND COMPUTER PROGRAM

Pub. No.:    WO/2018/042581    International Application No.:    PCT/JP2016/075588
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Fri Sep 02 01:59:59 CEST 2016
IPC: G01B 15/04
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社 日立ハイテクノロジーズ
Inventors: FUKUDA Hiroshi
福田 宏
Title: PATTERN MEASUREMENT DEVICE AND COMPUTER PROGRAM
Abstract:
The purpose of the present invention is to provide a pattern measurement device that achieves both high-throughput measurement using a small number of measurements and high-accuracy measurement that uses statistical processing. To accomplish this purpose, the present invention proposes a pattern measurement device provided with a calculation processing device that acquires the signal intensity distribution for a plurality of positions included in a scanning region from a signal obtained through beam scanning; substitutes, into a probability density function having the signal intensity distribution as a random variable and the coordinates within the scanning region as a variable, a signal intensity distribution based on the signal obtained from the beam scanning; and for the plurality of positions within the scanning region, sets the coordinates within the scanning region at which the probability density function is at the maximum or at which prescribed conditions are met as the edge position.