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1. (WO2018042580) IMAGE MEASUREMENT METHOD, IMAGE MEASUREMENT PROGRAM, IMAGE MEASUREMENT DEVICE, AND ARTICLE PRODUCTION METHOD

Pub. No.:    WO/2018/042580    International Application No.:    PCT/JP2016/075580
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Thu Sep 01 01:59:59 CEST 2016
IPC: G01B 11/00
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: KUBOTA, Junichi
窪田純一
Title: IMAGE MEASUREMENT METHOD, IMAGE MEASUREMENT PROGRAM, IMAGE MEASUREMENT DEVICE, AND ARTICLE PRODUCTION METHOD
Abstract:
To provide an image measurement method that makes simple image measurement possible, an image measurement method is made to include the selection of an image from among images of different parts of a first article on the basis of characteristics of the images, alignment of a second article on the basis of the selected image and an image of a part of the second article corresponding to the selected image, and image measurement of the second article.