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1. (WO2018042531) MEASURING DEVICE AND MEASURING METHOD
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Pub. No.: WO/2018/042531 International Application No.: PCT/JP2016/075413
Publication Date: 08.03.2018 International Filing Date: 31.08.2016
IPC:
H01J 37/21 (2006.01) ,H01J 37/10 (2006.01) ,H01J 37/20 (2006.01) ,H01J 37/244 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
21
Means for adjusting the focus
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
04
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
10
Lenses
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
20
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
244
Detectors; Associated components or circuits therefor
Applicants:
株式会社日立ハイテクノロジーズ HITACHI HIGH-TECHNOLOGIES CORPORATION [JP/JP]; 東京都港区西新橋一丁目24番14号 24-14, Nishi Shimbashi 1-chome, Minato-ku, Tokyo 1058717, JP
Inventors:
高橋 範次 TAKAHASHI, Noritsugu; JP
榊原 慎 SAKAKIBARA, Makoto; JP
森 渉 MORI, Wataru; JP
川野 源 KAWANO, Hajime; JP
笹氣 裕子 SASAKI, Yuko; JP
Agent:
特許業務法人藤央特許事務所 TOU-OU PATENT FIRM; 東京都港区虎ノ門一丁目16番4号アーバン虎ノ門ビル Urban Toranomon Bldg., 16-4, Toranomon 1-chome, Minato-ku, Tokyo 1050001, JP
Priority Data:
Title (EN) MEASURING DEVICE AND MEASURING METHOD
(FR) DISPOSITIF DE MESURE ET PROCÉDÉ DE MESURE
(JA) 計測装置及び計測方法
Abstract:
(EN) Disclosed is a measuring device that measures a sample by irradiating the sample with a charged particle beam, said measuring device being provided with a particle source, an electron lens, a detector, a stage, a sensor that measures environment, and a control device. The control device has a control module that includes: a height calculation module that calculates a predicted height value that indicates a predicted value of the height of the sample at a sample measuring position; and a correction value calculation module that calculates a correction value reflecting an environmental change, said correction value being calculated on the basis of the sample measuring position, and an environmental change quantity measured by the sensor. The control module corrects, on the basis of the correction value, the predicted height value, and sets, on the basis of a corrected predicted height value, a control value for controlling focus adjustment using the electron lens.
(FR) L'invention concerne un dispositif de mesure destiné à mesurer un échantillon en exposant ce dernier à un faisceau de particules chargées, ledit dispositif de mesure disposant d'une source de particules, d'une lentille électronique, d'un détecteur, d'un étage, d'un capteur destiné à mesurer l'environnement, et d'un dispositif de commande. Le dispositif de commande comporte un module de commande qui comprend : un module de calcul de hauteur destiné à calculer une valeur de hauteur prédite indiquant une valeur prédite de la hauteur de l'échantillon en une position de mesure d'échantillon ; et un module de calcul de valeur de correction destiné à calculer une valeur de correction reflétant un changement environnemental, ladite valeur de correction étant calculée sur la base de la position de mesure d'échantillon et d'une quantité de changement environnemental mesurée par le capteur. Le module de commande corrige, sur la base de la valeur de correction, la valeur de hauteur prédite, et établit, sur la base d'une valeur de hauteur prédite corrigée, une valeur de commande permettant de commander le réglage de mise au point à l'aide de la lentille électronique.
(JA) 荷電粒子線を照射することによって試料の計測を行う計測装置であって、粒子源、電子レンズ、検出器、ステージ、環境を計測するセンサ、及び制御装置を備え、制御装置は、試料の計測位置における試料の高さの予測値を示す高さ予測値を算出する高さ算出モジュールと、試料の計測位置及び前記センサによって計測された環境の変化量に基づいて、環境の変化を反映した補正値を算出する補正値算出モジュールと、を含む制御モジュールを有し、制御モジュールは、補正値に基づいて高さ予測値を修正し、修正された高さ予測値に基づいて電子レンズを用いたフォーカス調整を制御するための制御値を設定する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)