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1. (WO2018042441) FEMTOSECOND LASER INSCRIPTION
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/042441 International Application No.: PCT/IL2017/050982
Publication Date: 08.03.2018 International Filing Date: 03.09.2017
IPC:
B23K 26/00 (2014.01) ,G02B 6/10 (2006.01) ,B23K 26/06 (2014.01)
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6
Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
10
of the optical waveguide type
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
02
Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06
Shaping the laser beam, e.g. by masks or multi-focusing
Applicants:
CYPRUS UNIVERSITY OF TECHNOLOGY [CY/CY]; 30 Archbishop Kyprianou Str. Limassol, 3036, CY
REINHOLD COHN AND PARTNERS [IL/IL]; P.O.Box 13239 6113102 Tel Aviv, IL (MW)
Inventors:
KALLI, Kyriacos; CY
Agent:
SCHNUR, Myriam; Reinhold Cohn And Partners P.O.Box 13239 6113102 Tel Aviv, IL
Priority Data:
62/382,78802.09.2016US
62/463,89927.02.2017US
Title (EN) FEMTOSECOND LASER INSCRIPTION
(FR) INSCRIPTION PAR LASERS À IMPULSIONS FEMTOSECONDES
Abstract:
(EN) The present invention relates to a novel method and system for inscription of periodic patterns inside or on a surface of a substrate using femtosecond pulse lasers. The method comprises the following steps: (a) receiving a plurality of femtosecond laser pulsed beams, each beam having a certain pulse duration, flux, focal spot size, profile and energy at a certain wavelength of operation; (b) controlling at least one of the pulse duration, flux, focal spot size, focal spot shape, profile and energy of the plurality of laser pulsed beams; (c) directing the plurality of laser pulsed beams onto a certain region of a substrate having an optical axis, to thereby selectively induce at least one of local index change, microvoids and stress-modulated region at a point of interaction between each beam and the certain region; (d) controllably displacing the substrate along its optical axis to create the periodic patterns on a first plane of inscription along the optical axis; and (e) creating spaced-apart planes across the substrate having a controlled index profile at least in two dimensions.
(FR) La présente invention concerne un nouveau procédé et un nouveau système d'inscription de motifs périodiques à l'intérieur d'une surface d'un substrat ou sur cette dernière à l'aide de lasers à impulsions femtosecondes. Le procédé comprend les étapes suivantes consistant : (a) à recevoir une pluralité de faisceaux laser à impulsions femtosecondes, chaque faisceau ayant une certaine durée d'impulsion, un flux, une taille de point focal, un profil et une énergie à une certaine longueur d'onde de fonctionnement ; (b) à commander au moins la durée d'impulsion, le flux, la taille de point focal, la forme de point focal, le profil et/ou l'énergie de la pluralité de faisceaux laser pulsés ; (c) à diriger la pluralité de faisceaux laser pulsés sur une certaine région d'un substrat ayant un axe optique, pour ainsi induire sélectivement au moins un changement d'indice local, des microvides et une région modulée par contrainte au niveau d'un point d'interaction entre chaque faisceau et la certaine région ; (d) à déplacer de manière contrôlée le substrat le long de son axe optique pour créer les motifs périodiques sur un premier plan d'inscription le long de l'axe optique ; et (e) à créer des plans espacés sur le substrat ayant un profil d'indice contrôlé au moins dans deux dimensions.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)