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1. (WO2018041507) PATTERNING STACK OPTIMIZATION

Pub. No.:    WO/2018/041507    International Application No.:    PCT/EP2017/069513
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Thu Aug 03 01:59:59 CEST 2017
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: TEL, Wim, Tjibbo
FINDERS, Jozef, Maria
MOURAILLE, Orion, Jonathan, Pierre
VAN OOSTEN, Anton, Bernhard
Title: PATTERNING STACK OPTIMIZATION
Abstract:
A method of tuning a patterning stack, the method including: defining a function that measures how a parameter representing a physical characteristic pertaining to a pattern transferred into a patterning stack on a substrate is affected by change in a patterning stack variable, the patterning stack variable representing a physical characteristic of a material layer of the patterning stack; varying, by a hardware computer system, the patterning stack variable and evaluating, by the hardware computer system, the function with respect to the varied patterning stack variable, until a termination condition is satisfied; and outputting a value of the patterning stack variable when the termination condition is satisfied.