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1. (WO2018041444) METHOD FOR PRODUCING A MICROMECHANICAL SENSOR

Pub. No.:    WO/2018/041444    International Application No.:    PCT/EP2017/066724
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Thu Jul 06 01:59:59 CEST 2017
IPC: B81C 1/00
H04R 19/00
Applicants: ROBERT BOSCH GMBH
Inventors: CLASSEN, Johannes
Title: METHOD FOR PRODUCING A MICROMECHANICAL SENSOR
Abstract:
The invention relates to a method for producing a micromechanical sensor (100), comprising the following steps: providing an MEMS wafer (10) having an MEMS substrate (1), wherein a defined number of etched trenches is formed in the MEMS substrate (1) in a membrane region (3a), wherein the membrane region is formed in a first silicon layer (3), which is arranged at a defined distance from the MEMS substrate (1); providing a capping wafer (20); bonding the MEMS wafer (10) to the capping wafer (20); and forming a media access point (6) to the membrane region (3a) by grinding the MEMS substrate (1).