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1. (WO2018041371) SYSTEM AND METHOD FOR EMBOSSING MICRO-AND/OR NANO-STRUCTURES
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Pub. No.: WO/2018/041371 International Application No.: PCT/EP2016/070837
Publication Date: 08.03.2018 International Filing Date: 05.09.2016
Chapter 2 Demand Filed: 22.06.2018
IPC:
G03F 7/00 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Applicants:
EV GROUP E. THALLNER GMBH [AT/AT]; DI Erich Thallner Str. 1 St. Florian am Inn, AT
Inventors:
LINDNER, Friedrich, Paul; AT
ZAGLMAYR, Harald; AT
SCHÖN, Christian; AT
GLINSNER, Thomas; AT
REISINGER, Evelyn; AT
FISCHER, Peter; AT
LUKSCH, Othmar; AT
Agent:
SCHNEIDER, Sascha; DE
SCHWEIGER, Johannes; DE
BECKER, Dr, Thomas; DE
MÜLLER, Dr, Karl-Ernst; DE
BERKENBRINK, Kai; DE
FEUCKER, Max; DE
Priority Data:
Title (EN) SYSTEM AND METHOD FOR EMBOSSING MICRO-AND/OR NANO-STRUCTURES
(FR) INSTALLATION ET PROCÉDÉ POUR IMPRIMER DES MICRO- ET/OU NANOSTRUCTURES
(DE) ANLAGE UND VERFAHREN ZUM PRÄGEN VON MIKRO- UND/ODER NANOSTRUKTUREN
Abstract:
(EN) The invention relates to a system and a method for embossing of micro-and/or nano-structures.
(FR) L'invention concerne un installation et un procédé pour imprimer des micro- et/ou nanostructures.
(DE) Hiermit wird eine Anlage und ein Verfahren zum Prägen von Mikro- und/oder Nanostrukturen vorgeschlagen.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)