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1. (WO2018040687) METHOD FOR COATING THIN FILM FOR 40G100G OPTICAL FILTER

Pub. No.:    WO/2018/040687    International Application No.:    PCT/CN2017/089879
Publication Date: Fri Mar 09 00:59:59 CET 2018 International Filing Date: Sun Jun 25 01:59:59 CEST 2017
IPC: G02B 5/20
Applicants: OPTIMAL COATECH (GUANGZHOU) CO., LTD.
奥普镀膜技术(广州)有限公司
Inventors: DONG, Xinghua
董兴华
Title: METHOD FOR COATING THIN FILM FOR 40G100G OPTICAL FILTER
Abstract:
A method for coating a thin film for a 40G100G optical filter, comprising the steps of (1) substrate pretreatment: grinding a glass sheet to form a glass substrate of 0.55 mm; (2) cleaning and drying; (3) film coating, wherein evaporation coating is conducted on one side or both sides of the glass substrate using an evaporation coating machine, and a novel film system structure is nHLnHLnHL 2nH LnHLnHLnHL, wherein n is a matching coefficient of the film system structure, H is a tantalum pentoxide dielectric layer, and L is a silicon dioxide dielectric layer. The optical filter manufactured using this film coating process has the characteristics of an improved product surface shape accuracy; an increased product yield; an improved passband rectangularity, i.e. the passband rectangularity of the optical property of the product being improved; and an increased light incidence angle sensitivity, i.e. the light incidence angle sensitivity of the product being reduced to currently < 4 nm/º from originally 5.6 nm/º.