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1. (WO2018039578) LOW PRESSURE LIFT PIN CAVITY HARDWARE

Pub. No.:    WO/2018/039578    International Application No.:    PCT/US2017/048642
Publication Date: Fri Mar 02 00:59:59 CET 2018 International Filing Date: Sat Aug 26 01:59:59 CEST 2017
IPC: C23C 14/56
C23C 14/54
C23C 14/50
C23C 16/44
C23C 16/458
C23C 16/52
H01J 37/32
Applicants: APPLIED MATERIALS, INC.
Inventors: NICHOLS, Michael Thomas
YOUSIF, Imad
O'MALLEY, John Anthony, III
BABAYAN, Steven E.
Title: LOW PRESSURE LIFT PIN CAVITY HARDWARE
Abstract:
Embodiments disclosed herein generally relate to a pumping system for a plasma processing apparatus. The pumping system includes a first pump path, a second pump path, a first valve, and a second valve. The first pump path couples an opening of a substrate support assembly of the processing chamber to an exhaust port of the processing chamber. The second pump path couples the opening of the substrate support assembly to an evacuation region of the processing chamber. The first valve is positioned in the first pump path. The first valve is configurable between a first state and a second state. The second valve is positioned in the second pump path. The second valve is configurable between the first state and the second state.