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|1. (WO2018039578) LOW PRESSURE LIFT PIN CAVITY HARDWARE|
|Applicants:||APPLIED MATERIALS, INC.
|Inventors:||NICHOLS, Michael Thomas
O'MALLEY, John Anthony, III
BABAYAN, Steven E.
|Title:||LOW PRESSURE LIFT PIN CAVITY HARDWARE|
Embodiments disclosed herein generally relate to a pumping system for a plasma processing apparatus. The pumping system includes a first pump path, a second pump path, a first valve, and a second valve. The first pump path couples an opening of a substrate support assembly of the processing chamber to an exhaust port of the processing chamber. The second pump path couples the opening of the substrate support assembly to an evacuation region of the processing chamber. The first valve is positioned in the first pump path. The first valve is configurable between a first state and a second state. The second valve is positioned in the second pump path. The second valve is configurable between the first state and the second state.