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1. (WO2018039555) THICKNESS MEASUREMENT OF SUBSTRATE USING COLOR METROLOGY

Pub. No.:    WO/2018/039555    International Application No.:    PCT/US2017/048605
Publication Date: Fri Mar 02 00:59:59 CET 2018 International Filing Date: Sat Aug 26 01:59:59 CEST 2017
IPC: H01L 21/66
Applicants: APPLIED MATERIALS, INC.
Inventors: BENVEGNU, Dominic J.
Title: THICKNESS MEASUREMENT OF SUBSTRATE USING COLOR METROLOGY
Abstract:
A metrology system for obtaining a measurement representative of a thickness of a layer on a substrate includes a camera positioned to capture a color image of at least a portion of the substrate. A controller is configured to receive the color image from the camera, store a predetermined path in a coordinate space of at least two dimension including a first color channel and a second color channel, store a function that provides a value representative of a thickness as a function of a position on the predetermined path, determine a coordinate of a pixel in the coordinate space from color data in the color image for the pixel, determine a position of a point on the predetermined path that is closest to the coordinate of the pixel, and calculate a value representative of a thickness from the function and the position of the point on the predetermined path.