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1. (WO2018039255) INFRARED CHARACTERIZATION OF A SAMPLE USING OSCILLATING MODE
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Pub. No.: WO/2018/039255 International Application No.: PCT/US2017/048049
Publication Date: 01.03.2018 International Filing Date: 22.08.2017
IPC:
G01N 21/35 (2006.01) ,G01N 21/33 (2006.01) ,G01Q 60/24 (2010.01) ,G01N 29/12 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35
using infra-red light
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
33
using ultra-violet light
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
60
Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof
24
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29
Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04
Analysing solids
12
by measuring frequency or resonance of acoustic waves
Applicants:
BRUKER NANO, INC. [US/US]; 112 Robin Hill Road Santa Barbara, CA 93117, US
LEHIGH UNIVERSITY [US/US]; 526 Brodhead Avenue Bethlehem, PA 18015, US
Inventors:
SU, Chanmin; US
WAGNER, Martin; US
XU, Xiaoji; US
Agent:
DURST, Jay, G.; US
Priority Data:
62/378,10722.08.2016US
62/506,96216.05.2017US
Title (EN) INFRARED CHARACTERIZATION OF A SAMPLE USING OSCILLATING MODE
(FR) CARACTÉRISATION INFRAROUGE D'UN ÉCHANTILLON À L'AIDE D'UN MODE D'OSCILLATION
Abstract:
(EN) An apparatus and method of performing sample characterization with an AFM and a pulsed IR laser directed at the tip of a probe of the AFM. The laser pulses are synchronized with the oscillatory drive of the AFM and may only interact with the tip/sample on selected cycles of the oscillation. Peak force tapping mode is preferred for AFM operation. Nano-mechanical and nano-spectroscopic measurements can be made with sub-50 nm, and even sub-20 nm, resolution.
(FR) L'invention concerne un appareil et un procédé de réalisation d'une caractérisation d'échantillon avec un AFM et d'un laser IR pulsé dirigé au niveau de la pointe d'une sonde de l'AFM. Les impulsions laser sont synchronisées avec l'entraînement oscillatoire de l'AFM et peuvent uniquement entrer en interaction avec la pointe/l'échantillon sur des cycles sélectionnés de l'oscillation. Un mode de tapotement à force maximale est préféré pour le fonctionnement de l'AFM. Des mesures nano-mécaniques et nano-spectroscopiques peuvent être effectuées avec une résolution inférieure à 50 nm, et même inférieure à 20 nm.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)