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1. (WO2018039075) MULTI-PIN DENSE ARRAY RESISTIVITY PROBE

Pub. No.:    WO/2018/039075    International Application No.:    PCT/US2017/047622
Publication Date: Fri Mar 02 00:59:59 CET 2018 International Filing Date: Sat Aug 19 01:59:59 CEST 2017
IPC: G01R 1/073
G01R 1/067
G01R 31/28
Applicants: KLA-TENCOR CORPORATION
Inventors: CUI, Jianli
JOHNSON, Walter H.
LIU, Xianghua
SHI, Bin (Zhubin)
SHI, Jianou
YOU, Haiyang (Ocean)
YU, Lu
ZHANG, Fan
ZHANG, Zhuoxian
ZHU, NanChang
Title: MULTI-PIN DENSE ARRAY RESISTIVITY PROBE
Abstract:
Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.