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1. (WO2018038889) BIPOLAR ELECTROSTATIC CHUCK AND METHOD FOR USING THE SAME

Pub. No.:    WO/2018/038889    International Application No.:    PCT/US2017/045240
Publication Date: Fri Mar 02 00:59:59 CET 2018 International Filing Date: Fri Aug 04 01:59:59 CEST 2017
IPC: H01L 21/683
H02N 13/00
B23Q 3/15
Applicants: APPLIED MATERIALS, INC.
Inventors: WHITE, John M.
RAO, Shreesha Y.
Title: BIPOLAR ELECTROSTATIC CHUCK AND METHOD FOR USING THE SAME
Abstract:
Described herein are an electrostatic chuck and method for using the same. In one example, an electrostatic chuck is provided that includes a plurality of independently replaceable electrostatic chuck assemblies mounted in an array across a chuck body. The electrostatic chuck assemblies define a substrate support surface suitable for supporting a large area substrate. At least a first electrostatic chuck assembly of the plurality of electrostatic chuck assemblies is operable independent of an operation of a second electrostatic chuck assembly of the plurality of electrostatic chuck assemblies. In yet another example, a method for chucking a substrate is provided.