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1. (WO2018038001) METHOD FOR PRODUCING FILM, METHOD FOR PRODUCING LAMINATED BODY, AND METHOD FOR PRODUCING ELECTRONIC DEVICE

Pub. No.:    WO/2018/038001    International Application No.:    PCT/JP2017/029573
Publication Date: Fri Mar 02 00:59:59 CET 2018 International Filing Date: Sat Aug 19 01:59:59 CEST 2017
IPC: B05D 7/24
B05D 3/02
B32B 27/34
G03F 7/027
G03F 7/037
G03F 7/075
Applicants: FUJIFILM CORPORATION
富士フイルム株式会社
Inventors: SAWANO Mitsuru
沢野 充
KAMOCHI Yoshitaka
加持 義貴
INUJIMA Takayoshi
犬島 孝能
IWAI Yu
岩井 悠
ITO Katsuyuki
伊藤 勝志
VANCLOOSTER Stefan
ヴァンクロースター ステファン
Title: METHOD FOR PRODUCING FILM, METHOD FOR PRODUCING LAMINATED BODY, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
Abstract:
Provided are a method for producing a laminated body with excellent adhesion and a method for producing an electronic device. In implementing same, a resin composition layer is formed on a support a resin composition containing a polyimide precursor and a reactive group-containing silane coupling agent, and the resin composition layer is heated in a multi-stage heating process including at least two heating stages, wherein the second heating stage is performed at a heating temperature higher than a heating temperature in the first heating stage.