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1. (WO2018037619) MEASUREMENT DEVICE
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Pub. No.: WO/2018/037619 International Application No.: PCT/JP2017/015870
Publication Date: 01.03.2018 International Filing Date: 20.04.2017
IPC:
G01B 11/24 (2006.01) ,G01B 9/02 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
Applicants: CKD CORPORATION[JP/JP]; 250, Ouji 2-chome, Komaki-shi, Aichi 4858551, JP
Inventors: ISHIGAKI Hiroyuki; JP
MAMIYA Takahiro; JP
Agent: KAWAGUCHI Mitsuo; JP
Priority Data:
2016-16322024.08.2016JP
Title (EN) MEASUREMENT DEVICE
(FR) DISPOSITIF DE MESURE
(JA) 計測装置
Abstract:
(EN) Provided is a measurement device that is capable of enhancing measurement accuracy and measurement efficiency. This measurement device 1 uses interference fringe images obtained through imaging using imaging systems 4A, 4B to acquire complex amplitude data at a plurality of positions in the z-direction for a partial z-position examination area set beforehand within a prescribed measurement area of a workpiece W. Next, a plurality of intensity images for the z-position examination area are acquired from the plurality of sets of complex amplitude data, and a z-direction position in the z-position examination area is determined on the basis of the plurality of sets of intensity images. Further, three-dimensional measurement of the measurement area is carried out through the acquisition of complex amplitude data at this position for the entire measurement area.
(FR) La présente invention concerne un dispositif de mesure qui permet d’améliorer la précision de mesure et l’efficacité de mesure. Ce dispositif de mesure 1 utilise des images de frange d’interférence obtenues par imagerie au moyen de systèmes d’imagerie 4A, 4B pour acquérir des données d’amplitude complexes à une pluralité de positions dans la direction z pour une zone d’examen de position z partielle définie au préalable dans une zone de mesure prescrite d’une pièce de fabrication W. Ensuite, une pluralité d’images d’intensité pour la zone d’examen de position z sont acquises à partir de la pluralité d’ensembles de données d’amplitude complexes, et une position dans la direction z dans la zone d’examen de position z est déterminée sur la base de la pluralité d’ensembles d’images d’intensité. En outre, une mesure tridimensionnelle de l’aire de mesure est effectuée par acquisition de données d’amplitude complexes à cette position pour la totalité de la zone de mesure.
(JA) 計測精度の向上を図ると共に、計測効率の向上を図ることのできる計測装置を提供する。計測装置1は、撮像系4A,4Bにより撮像し得られた干渉縞画像を基に、ワークWの所定の計測領域内に予め設定した一部のz位置調査領域について、z方向複数位置における複素振幅データを取得する。続いて、該複数通りの複素振幅データからz位置調査領域に係る複数通りの強度画像を取得し、該複数通りの強度画像を基にz位置調査領域のz方向における位置を決定する。そして、この位置における複素振幅データを計測領域全体について取得して、計測領域に係る三次元計測を実行する。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)