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1. (WO2018037444) ELECTRON MICROSCOPE AND OBSERVATION METHOD

Pub. No.:    WO/2018/037444    International Application No.:    PCT/JP2016/074355
Publication Date: Fri Mar 02 00:59:59 CET 2018 International Filing Date: Tue Aug 23 01:59:59 CEST 2016
IPC: H01J 37/295
H01J 37/22
H01J 37/26
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: TAMAKI Hirokazu
玉置 央和
TAMURA Keiji
田村 圭司
TANIGUCHI Yoshifumi
谷口 佳史
KASAI Hiroto
葛西 裕人
YAGUCHI Toshie
矢口 紀恵
YOTSUJI Takafumi
四辻 貴文
HARADA Ken
原田 研
Title: ELECTRON MICROSCOPE AND OBSERVATION METHOD
Abstract:
Provided is an electron microscope which irradiates a sample with an electron beam to perform observation, the electron microscope comprising: an edge element that is disposed in a diffraction plane, or a plane equivalent thereto, at which non-diffracted waves that pass without receiving diffraction from the sample converge; and a control device that controls the electron beam or the edge element. The edge element includes a shield part that blocks the electron beam, and an opening through which the electron beam passes. The opening is constituted by an edge of the shield member so as to surround the point at which the non-diffracted waves converge in the diffraction plane. The control device changes the contrast of an observation image by maintaining the distance between the point at which the non-diffracted waves converge and the edge at a predetermined interval, and changing the position of the point at which the non-diffracted waves converge, such change made relative to the edge and along the edge.