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|1. (WO2018037444) ELECTRON MICROSCOPE AND OBSERVATION METHOD|
|Applicants:||HITACHI HIGH-TECHNOLOGIES CORPORATION
|Title:||ELECTRON MICROSCOPE AND OBSERVATION METHOD|
Provided is an electron microscope which irradiates a sample with an electron beam to perform observation, the electron microscope comprising: an edge element that is disposed in a diffraction plane, or a plane equivalent thereto, at which non-diffracted waves that pass without receiving diffraction from the sample converge; and a control device that controls the electron beam or the edge element. The edge element includes a shield part that blocks the electron beam, and an opening through which the electron beam passes. The opening is constituted by an edge of the shield member so as to surround the point at which the non-diffracted waves converge in the diffraction plane. The control device changes the contrast of an observation image by maintaining the distance between the point at which the non-diffracted waves converge and the edge at a predetermined interval, and changing the position of the point at which the non-diffracted waves converge, such change made relative to the edge and along the edge.