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1. (WO2018037205) MEMS DEVICE AND PROCESS
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Pub. No.: WO/2018/037205 International Application No.: PCT/GB2017/052326
Publication Date: 01.03.2018 International Filing Date: 08.08.2017
IPC:
H04R 19/00 (2006.01)
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19
Electrostatic transducers
Applicants:
CIRRUS LOGIC INTERNATIONAL SEMICONDUCTOR LIMITED [GB/GB]; 7B Nightingale Way Quartermile Edinburgh Lothian EH3 9EG, GB
Inventors:
DUFFY, Stephen; GB
JENKINS, Colin Robert; GB
HOEKSTRA, Tsjerk Hans; GB
Agent:
COOPER-ROLFE, Elizabeth; GB
Priority Data:
1616862.704.10.2016GB
62/377,87522.08.2016US
Title (EN) MEMS DEVICE AND PROCESS
(FR) DISPOSITIF MEMS ET PROCÉDÉ
Abstract:
(EN) The application describes a MEMS transducer comprising a layer of conductive material provided on a surface of a layer of membrane material. The layer of conductive material comprises first and second regions, wherein the thickness and/or the conductivity of the/each first and second regions is different.
(FR) L'invention concerne un transducteur MEMS comprenant une couche de matériau conducteur disposée sur une surface d'une couche de matériau de membrane. La couche de matériau conducteur comprend des première et seconde régions, l'épaisseur et/ou la conductivité des/de chaque première(s) et seconde(s) régions étant différentes.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)