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1. (WO2018036487) QUARTZ BOAT CONVEYING MECHANISM FOR USE IN DIFFUSION FURNACE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/036487 International Application No.: PCT/CN2017/098525
Publication Date: 01.03.2018 International Filing Date: 22.08.2017
IPC:
H01L 21/677 (2006.01) ,F27D 5/00 (2006.01) ,H01L 31/18 (2006.01) ,H01L 21/68 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
27
FURNACES; KILNS; OVENS; RETORTS
D
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
5
Supports, screens, or the like for the charge within the furnace
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31
Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
18
Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68
for positioning, orientation or alignment
Applicants:
深圳市捷佳伟创新能源装备股份有限公司 S.C NEW ENERGY TECHNOLOGY CORPORATION [CN/CN]; 中国广东省深圳市 龙岗区横岗街道横坪公路89号数字硅谷(涌鑫工业园)D栋 Building D (Yongxin Industrial Park) Digital Silicon Valley 89# Hengping Road, Henggang Street, Longgang District Shenzhen, Guangdong 518000, CN
Inventors:
肖岳南 XIAO, Yuenan; CN
张勇 ZHANG, Yong; CN
Agent:
深圳市康弘知识产权代理有限公司 SHENZHEN KANGHONG INTELLECTUAL PROPERTY AGENT CO., LTD; 中国广东省深圳市 福田区彩田路5015号中银花园办公楼A栋6C1 6C1, Building A, ZhongYin Building No.5015, CaiTian Rd., Futian District Shenzhen, Guangdong 518026, CN
Priority Data:
201620939004.025.08.2016CN
Title (EN) QUARTZ BOAT CONVEYING MECHANISM FOR USE IN DIFFUSION FURNACE
(FR) MÉCANISME DE TRANSPORT D'AMPOULE DE QUARTZ DESTINÉ À ÊTRE UTILISÉ DANS UN FOUR À DIFFUSION
(ZH) 一种用于扩散炉内的石英舟传送机构
Abstract:
(EN) A quartz boat conveying mechanism for use in a diffusion furnace comprises a vertical column (1) fixed at one side in a diffusion furnace (9), a boat pushing mechanism (2) fixed at the other side in the diffusion furnace, and a lateral boat-discharging mechanism (6) fixed at the bottom of the diffusion furnace. A plurality of temporary storage areas (3) are fixed at intervals on the column from top to bottom, an SiC paddle (4) horizontally extends from the boat pushing mechanism, an elevator channel area (5) is provided between the SiC paddle and the temporary storage areas, and a manipulator (7) moving up and down along the column is further provided on the column, a position at which the lateral boat-discharging mechanism (6) is fixed on the bottom of the diffusion furnace (9) being located directly below the temporary storage areas (3). Owing to the quartz boat conveying mechanism in the diffusion furnace, when a position at which the SiC paddle (4) picks up and places the boat is relatively low, the manipulator (7), after grasping the quartz boat (8) on the SiC paddle (4) for transfer to the elevator channel area (5), will not collide with a quartz boat (8) being transferred on the lateral boat-discharging mechanism (6).
(FR) Un mécanisme de transport d'ampoule de quartz destiné à être utilisé dans un four à diffusion comprend une colonne verticale (1) fixée sur un côté dans un four à diffusion (9), un mécanisme de poussée d'ampoule (2) fixé sur l'autre côté dans le four à diffusion, et un mécanisme d'évacuation d'ampoule latéral (6) fixé au fond du four à diffusion. Une pluralité de zones de stockage temporaire (3) sont fixées à des intervalles sur la colonne de haut en bas, une palette de SiC (4) s'étend horizontalement à partir du mécanisme de poussée d'ampoule, une zone de canal d'ascenseur (5) est disposée entre la palette de SiC et les zones de stockage temporaire, et un manipulateur (7) se déplaçant vers le haut et vers le bas le long de la colonne est en outre disposé sur la colonne, une position au niveau de laquelle le mécanisme d'évacuation d'ampoule latéral (6) est fixé sur le fond du four à diffusion (9) étant située directement en dessous des zones de stockage temporaire (3). Grâce au mécanisme de transport d'ampoule de quartz dans le four à diffusion, lorsqu'une position au niveau de laquelle la palette de SiC (4) prend et place l'ampoule est relativement basse, le manipulateur (7), après la saisie de l'ampoule de quartz (8) sur la palette de SiC (4) en vue du transfert vers la zone de canal d'ascenseur (5), ne va pas entrer en collision avec une ampoule de quartz (8) qui est transférée sur le mécanisme d'évacuation d'ampoule latéral (6).
(ZH) 一种用于扩散炉内的石英舟传送机构,包括固定于扩散炉(9)内一侧的竖直向上的立柱(1),固定于扩散炉内另一侧的推舟机构(2)以及固定于扩散炉底部的侧向出舟机构(6),所述立柱上由上至下固定有多个间隔开的暂存区(3),所述推舟机构上水平伸出一SIC桨(4),所述SIC桨与所述暂存区之间设有升降通道区(5),所述立柱上还设有一沿该立柱上下运动的机械手(7),所述侧向出舟机构(6)固定于扩散炉(9)底部的位置位于所述暂存区(3)的正下方。该扩散炉内的石英舟传送机构,在SIC桨(4)的取放舟位置较低时,机械手(7)在抓取SIC桨(4)上的石英舟(8)后传输到升降通道区(5)时不会与侧向出舟机构(6)上传输的石英舟(8)发生碰撞。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)