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1. (WO2018034934) PROCESS CHAMBER HAVING TUNABLE SHOWERHEAD AND TUNABLE LINER
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Pub. No.: WO/2018/034934 International Application No.: PCT/US2017/046268
Publication Date: 22.02.2018 International Filing Date: 10.08.2017
IPC:
H01J 37/32 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
Applicants:
APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
Inventors:
NGUYEN, Andrew; US
CHANG, Xue Yang; US
WANG, Haitao; US
KO, Kei-Yu; US
SADJADI, Reza; US
Agent:
BISHARA, Amir; US
TABOADA, Alan; US
MOSER, JR., Raymond R.; US
LINARDAKIS, Leonard P.; US
Priority Data:
15/673,40309.08.2017US
62/374,83713.08.2016US
Title (EN) PROCESS CHAMBER HAVING TUNABLE SHOWERHEAD AND TUNABLE LINER
(FR) CHAMBRE DE TRAITEMENT AYANT UNE POMME DE DOUCHE ACCORDABLE ET UN REVÊTEMENT ACCORDABLE
Abstract:
(EN) Process chambers having a tunable showerhead and a tunable liner are disclosed herein. In some embodiments, a processing chamber includes a showerhead; a chamber liner; a first impedance circuit coupled to the showerhead to tune an impedance of the showerhead; a second impedance circuit coupled to the chamber liner to tune an impedance of the chamber liner; and a controller coupled to the first and second impedance circuits to control relative impedances of the showerhead and the chamber liner.
(FR) L'invention concerne des chambres de traitement ayant une pomme de douche accordable et un revêtement accordable. Dans certains modes de réalisation, une chambre de traitement comprend une pomme de douche; un revêtement de chambre; un premier circuit d'impédance couplé à la pomme de douche pour accorder une impédance de la pomme de douche; un second circuit d'impédance couplé au revêtement de chambre pour accorder une impédance du revêtement de chambre; et un dispositif de commande couplé aux premier et second circuits d'impédance pour commander les impédances relatives de la pomme de douche et du revêtement de chambre.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)