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1. (WO2018034690) MODULAR MICROWAVE PLASMA SOURCE
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Pub. No.: WO/2018/034690 International Application No.: PCT/US2017/013984
Publication Date: 22.02.2018 International Filing Date: 18.01.2017
IPC:
H01J 37/32 (2006.01) ,H05H 1/46 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H
PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1
Generating plasma; Handling plasma
24
Generating plasma
46
using applied electromagnetic fields, e.g. high frequency or microwave energy
Applicants:
APPLIED MATERIALS,INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
Inventors:
KRAUS, Philip Allan; US
CHUA, Thai Cheng; US
Agent:
SERVILLA WHITNEY LLC; US
VINCENT, Lester J.; US
MALLIE, Michael J.; US
BLANK, Eric S.; US
Priority Data:
15/238,69516.08.2016US
Title (EN) MODULAR MICROWAVE PLASMA SOURCE
(FR) SOURCE DE PLASMA HYPERFRÉQUENCE MODULAIRE
Abstract:
(EN) Embodiments include a modular microwave source. In an embodiment, the modular microwave source comprises a voltage control circuit, a voltage controlled oscillator, where an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator. The modular microwave source may also include a solid state microwave amplification module coupled to the voltage controlled oscillator,. In an embodiment, the solid state microwave amplification module amplifies an output from the voltage controlled oscillator. The modular microwave source may also include an applicator coupled to the solid state microwave amplification module, where the applicator is a dielectric resonator.
(FR) L'invention concerne des modes de réalisation qui incluent une source hyperfréquence modulaire. Selon un mode de réalisation, la source hyperfréquence modulaire comprend un circuit de commande de tension, un oscillateur commandé en tension, une tension de sortie provenant du circuit de commande de tension entraînant l'oscillation dans l'oscillateur commandé en tension. La source hyperfréquence modulaire peut également inclure un module d'amplification hyperfréquence à semi-conducteurs couplé à l'oscillateur commandé en tension. Selon un mode de réalisation, le module d'amplification hyperfréquence amplifie une sortie provenant de l'oscillateur commandé en tension. La source hyperfréquence modulaire peut également inclure un module d'amplification hyperfréquence à semi-conducteurs, l'applicateur étant un résonateur diélectrique.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)