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1. (WO2018034317) HYDROGENCARBONATE WATER AND CLEANING METHOD USING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/034317    International Application No.:    PCT/JP2017/029515
Publication Date: 22.02.2018 International Filing Date: 17.08.2017
IPC:
C02F 1/46 (2006.01), C02F 1/68 (2006.01), H01L 21/304 (2006.01)
Applicants: GOHDA WATER TREATMENT TECHNOLOGY CO., INC. [JP/JP]; 6-1, Shintomi 1-chome, Chuo-ku, Tokyo 1040041 (JP).
MAG TECHNOLOGY CO., LTD. [KR/KR]; #601-207, Suwon Industry Distribution Center 986, Gosaek-Dong, Gownseon-Gu, Suwon-Si, Gyeonggi-Do, 441813 (KR)
Inventors: GOHDA, Toshihisa; (JP).
LEE, Jae Yong; (KR)
Agent: HIROTA, Masanori; (JP)
Priority Data:
10-2016-0105253 19.08.2016 KR
Title (EN) HYDROGENCARBONATE WATER AND CLEANING METHOD USING SAME
(FR) EAU HYDROGÉNOCARBONATÉE ET PROCÉDÉ DE NETTOYAGE L’UTILISANT
(JA) 炭酸水素水及びこれを使用する洗浄方法
Abstract: front page image
(EN)The present invention pertains to hydrogencarbonate water and a cleaning method using same. Provided are: hydrogencarbonate water characterized by being obtained by dissolving carbon dioxide in hydrogen water having a dissolved hydrogen concentration of 0.1-2.0 ppm; and a cleaning method characterized by cleaning a substrate by either immersing the substrate in said hydrogencarbonate water or spraying the hydrogencarbonate water on the substrate.
(FR)La présente invention concerne de l’eau hydrogénocarbonatée et un procédé de nettoyage l’utilisant. La présente invention comprend : de l’eau hydrogénocarbonatée caractérisée en ce qu’elle est obtenue par dissolution de dioxyde de carbone dans de l’eau hydrogénée ayant une concentration en hydrogène dissous de 0,1 à 2,0 ppm ; et un procédé de nettoyage caractérisé par le nettoyage d’un substrat soit en immergeant le substrat dans ladite eau hydrogénocarbonatée soit en pulvérisant l’eau hydrogénocarbonatée sur le substrat.
(JA)本発明は、炭酸水素水及びこれを使用する洗浄方法に関する。溶存水素濃度が0.1ppm~2.0ppmである水素水に二酸化炭素を溶解したことを特徴とする炭酸水素水。基板を前記炭酸水素水に浸漬する、又は基板に前記炭酸水素水を噴射することにより、基板を洗浄することを特徴とする洗浄方法。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)