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|1. (WO2018034020) SOFT X-RAY SOURCE, EXPOSURE APPARATUS, AND MICROSCOPE|
|Title:||SOFT X-RAY SOURCE, EXPOSURE APPARATUS, AND MICROSCOPE|
This soft X-ray source is provided with: a laser device 36 which generates a plasma containing an element included in a target 32 by irradiating the target with a laser beam 60, and causes soft X-rays 62 to radiate from the plasma; and a chamber 30 which houses the target in the interior thereof and which, when the laser device irradiates the target with the laser beam, adjusts the gas pressure of a gas in the interior to a pressure not lower than 10 Pa but lower than the atmospheric pressure.