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1. (WO2018032532) IMAGE CONTOUR GENERATION METHOD AND DEVICE

Pub. No.:    WO/2018/032532    International Application No.:    PCT/CN2016/097167
Publication Date: Fri Feb 23 00:59:59 CET 2018 International Filing Date: Tue Aug 30 01:59:59 CEST 2016
IPC: H01L 21/66
Applicants: DONGFANG JINGYUAN ELECTRON LIMITED
东方晶源微电子科技(北京)有限公司
Inventors: MA, Weimin
马卫民
YU, Zongqiang
俞宗强
Title: IMAGE CONTOUR GENERATION METHOD AND DEVICE
Abstract:
An image contour generation method and device. The method comprises: generating, on the basis of design target information, a mask pattern (502), and generating, on the basis of a photolithography effect simulation, a reference image from the mask pattern (502); and generating, on the basis of edge detection of the reference image, a contour pattern (702) of the reference image, and acquiring, from a memory, a scanned image (802) of an integrated circuit to generate a contour pattern (902) of the scanned image, the contour pattern of the scanned image being a function of the contour pattern (702) of the reference image and the scanned image (802) of the integrated circuit.