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1. (WO2018031602) SCANNING PROBE AND ELECTRON MICROSCOPE PROBES AND THEIR MANUFACTURE
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Pub. No.: WO/2018/031602 International Application No.: PCT/US2017/046000
Publication Date: 15.02.2018 International Filing Date: 09.08.2017
IPC:
G01Q 70/16 (2010.01) ,G01Q 60/24 (2010.01) ,G01Q 60/38 (2010.01)
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
70
General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/196
16
Probe manufacture
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
60
Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof
24
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
60
Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof
24
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
38
Probes, their manufacture or their related instrumentation, e.g. holders
Applicants:
TIPTEK, LLC [US/US]; 1122 Woodstock Lane West Chester, Pennsylvania 19382, US
Inventors:
GIROLAMI, Gregory S.; US
LYDING, Joseph W.; US
LOCKLEDGE, Scott P.; US
LEE, Jinju; US
Agent:
ROSENBERG, Frank; US
Priority Data:
15/235,88912.08.2016US
Title (EN) SCANNING PROBE AND ELECTRON MICROSCOPE PROBES AND THEIR MANUFACTURE
(FR) SONDES DE MICROSCOPE EN CHAMP PROCHE ET DE MICROSCOPE ÉLECTRONIQUE ET LEUR FABRICATION
Abstract:
(EN) Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.
(FR) Cette invention concerne des procédés de fabrication économique de pointes de sonde de microscopes en champ proche et électronique (SPEM). Dans ce procédé, de multiples fils sont montés sur un étage usinés par bombardement électronique tandis que l'étage et les sondes montées sont inclinés à un angle sélectionné par rapport à la source d'ions et entraînés en rotation. L'invention concerne en outre les sondes ainsi obtenues. Le procédé fournit des ensembles de pointes de sonde hautement uniformes ayant des propriétés contrôlables pour des mesures stables et précises de microscopes en champ proche et électroniques (EM).
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)