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1. (WO2018031574) OPTICAL MEASUREMENT OF BUMP HEIGHT
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/031574 International Application No.: PCT/US2017/045950
Publication Date: 15.02.2018 International Filing Date: 08.08.2017
IPC:
G01B 11/02 (2006.01) ,G01B 9/04 (2006.01) ,G01B 11/24 (2006.01) ,G06T 1/00 (2006.01) ,G06T 7/60 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
02
for measuring length, width, or thickness
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
04
Measuring microscopes
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
1
General purpose image data processing
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7
Image analysis, e.g. from bit-mapped to non bit-mapped
60
Analysis of geometric attributes, e.g. area, centre of gravity, perimeter, from an image
Applicants: KLA-TENCOR CORPORATION[US/US]; Legal Department One Technology Drive Milpitas, CA 95035, US
Inventors: SOETARMAN, Ronny; US
XU, James, Jianguo; US
Agent: MCANDREWS, Kevin; US
MORRIS, Elizabeth M., N; US
Priority Data:
15/233,81210.08.2016US
15/338,83831.10.2016US
15/346,59408.11.2016US
15/346,60708.11.2016US
Title (EN) OPTICAL MEASUREMENT OF BUMP HEIGHT
(FR) MESURE OPTIQUE DE LA HAUTEUR D'UNE BOSSE
Abstract:
(EN) A method of generating 3D information including: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps; capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic value across a first portion of pixels in the captured image; comparing the greatest characteristic value for each captured image to determine if a surface of the sample is present at each pre-determined step; determining a first captured image that is focused on an apex of a bump of the sample; determining a second captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image; and determining a first distance between the apex of the bump and the first surface.
(FR) L'invention concerne un procédé de génération d'informations 3D consistant à : modifier la distance entre l'échantillon et une lentille d'objectif du microscope optique à des étapes prédéfinies ; capturer une image à chaque étape prédéfinie ; déterminer une valeur caractéristique de chaque pixel dans chaque image capturée ; déterminer, pour chaque image capturée, la valeur caractéristique la plus élevée dans une première partie de pixels dans l'image capturée ; comparer la valeur caractéristique la plus élevée pour chaque image capturée afin de déterminer si une surface de l'échantillon est présente à chaque étape prédéfinie ; déterminer une première image capturée qui est focalisée sur un sommet d'une bosse de l'échantillon ; déterminer une seconde image capturée qui est focalisée sur une première surface de l'échantillon sur la base de la valeur caractéristique de chaque pixel dans chaque image capturée ; et déterminer une première distance entre le sommet de la bosse et la première surface.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)