WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Options
Query Language
Stem
Sort by:
List Length
Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2018030733) METHOD AND SYSTEM FOR ANALYZING MEASUREMENT-YIELD CORRELATION
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/030733 International Application No.: PCT/KR2017/008500
Publication Date: 15.02.2018 International Filing Date: 07.08.2017
IPC:
G06Q 10/06 (2012.01) ,G06Q 10/04 (2012.01) ,G06F 17/18 (2006.01) ,G06Q 50/04 (2012.01)
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
Q
DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
10
Administration; Management
06
Resources, workflows, human or project management, e.g. organising, planning, scheduling or allocating time, human or machine resources; Enterprise planning; Organisational models
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
Q
DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
10
Administration; Management
04
Forecasting or optimisation, e.g. linear programming, "travelling salesman problem" or "cutting stock problem"
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
F
ELECTRIC DIGITAL DATA PROCESSING
17
Digital computing or data processing equipment or methods, specially adapted for specific functions
10
Complex mathematical operations
18
for evaluating statistical data
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
Q
DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
50
Systems or methods specially adapted for a specific business sector, e.g. utilities or tourism
04
Manufacturing
Applicants: SK HOLDINGS CO., LTD.[KR/KR]; 26, Jong-ro, Jongno-gu, Seoul 03188, KR
Inventors: HONG, Tae Young; KR
LEE, Byung Min; KR
KIM, Sung Tae; KR
Agent: HAN, Gee Na; KR
Priority Data:
10-2016-010211211.08.2016KR
Title (EN) METHOD AND SYSTEM FOR ANALYZING MEASUREMENT-YIELD CORRELATION
(FR) PROCÉDÉ ET SYSTÈME D'ANALYSE DE CORRÉLATION MESURE/RENDEMENT
(KO) 계측-수율 상관성 분석 방법 및 시스템
Abstract:
(EN) A method and a system for analyzing a measurement-yield correlation are provided. The method for analyzing a measurement-yield correlation according to an embodiment of the present invention derives a first yield prediction function by using measurement-yield data which are data pairs of process result data measured after performing a process and actual yield data for each of the collected process result data, extracts some of the measurement-yield data by using a first yield prediction function, and subsequently derives a second yield prediction function by using the extracted measurement-yield data. As such, the measurement-yield correlation indicating high correlation/reliability can be derived, so that a final yield can be predicted relatively accurately from the process result data measured after performing the process.
(FR) L'invention concerne un procédé et un système permettant d'analyser une corrélation mesure/rendement. Selon un mode de réalisation de l'invention, le procédé permettant d'analyser une corrélation mesure/rendement dérive une première fonction de prédiction de rendement en utilisant des données mesure/rendement, qui sont des paires de données de résultats de processus mesurées après l'exécution d'un processus, et des données de rendement réelles pour chacune des données de résultats de processus collectées, puis extrait certaines des données mesure/rendement en utilisant une première fonction de prédiction de rendement et déduit une seconde fonction de prédiction de rendement à l'aide des données mesure/rendement extraites. Il est donc possible de dériver la corrélation mesure-rendement indiquant une corrélation/fiabilité élevée afin de pouvoir prédire un rendement final de manière relativement précise à partir des données de résultats de processus mesurées après l'exécution du procsesus.
(KO) 계측-수율 상관성 분석 방법 및 시스템이 제공된다. 본 발명의 실시예에 따른 계측-수율 상관성 분석 방법은, 공정을 수행한 후에 계측한 공정 결과 데이터와 수집된 공정 결과 데이터들 각각에 대한 실제 수율 데이터들의 데이터 쌍인 계측-수율 데이터들을 이용하여 제1 수율 예측 함수를 도출하고, 제1 수율 예측 함수를 이용하여 계측-수율 데이터들 중 일부를 추출한 후, 추출된 계측-수율 데이터들을 이용하여 제2 수율 예측 함수를 도출한다. 이에 의해, 높은 상관도/신뢰도를 나타내는 계측-수율 상관성을 도출할 수 있어, 공정을 수행한 후에 계측한 공정 결과 데이터로부터 최종 수율을 비교적 정확하게 예측할 수 있게 된다.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)