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1. (WO2018030433) CERAMIC HEATER

Pub. No.:    WO/2018/030433    International Application No.:    PCT/JP2017/028835
Publication Date: Fri Feb 16 00:59:59 CET 2018 International Filing Date: Wed Aug 09 01:59:59 CEST 2017
IPC: H01L 21/683
Applicants: NGK INSULATORS, LTD.
日本碍子株式会社
Inventors: UNNO, Yutaka
海野 豊
TAKEBAYASHI, Hiroshi
竹林 央史
Title: CERAMIC HEATER
Abstract:
A ceramic heater according to the present invention has a wafer placement surface for placing a wafer on an upper surface of a disc-shaped ceramic plate. One or more inner-circumferential-side heater elements are embedded in an inner circumferential region of the ceramic plate, and one or more outer-circumferential-side heater elements are embedded in an outer circumferential region. The thickness of a prescribed region of the ceramic plate is 3.9% or less of the diameter of the ceramic plate. Here, the prescribed region is a region including a border line between the inner circumferential region and the outer circumferential region.