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1. (WO2018030427) COMPOSITION AND MOLDED ARTICLE
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Pub. No.: WO/2018/030427 International Application No.: PCT/JP2017/028820
Publication Date: 15.02.2018 International Filing Date: 08.08.2017
IPC:
C08L 27/12 (2006.01) ,C08L 77/00 (2006.01)
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
L
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
27
Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
02
not modified by chemical after-treatment
12
containing fluorine atoms
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
L
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
77
Compositions of polyamides obtained by reactions forming a carboxylic amide link in the main chain; Compositions of derivatives of such polymers
Applicants:
国立大学法人秋田大学 AKITA UNIVERSITY [JP/JP]; 秋田県秋田市手形学園町1番1号 1-1, Tegata Gakuen-Machi, Akita-shi, Akita 0108502, JP
ダイキン工業株式会社 DAIKIN INDUSTRIES, LTD. [JP/JP]; 大阪府大阪市北区中崎西二丁目4番12号 梅田センタービル Umeda Center Building, 4-12, Nakazaki-Nishi 2-Chome, Kita-ku, Osaka-Shi, Osaka 5308323, JP
Inventors:
松本 和也 MATSUMOTO, Kazuya; JP
寺境 光俊 JIKEI, Mitsutoshi; JP
山川 澄人 YAMAKAWA, Sumito; JP
櫻田 忠建 SAKURADA, Tadatake; JP
上谷 文宏 KAMIYA, Fumihiro; JP
野口 剛 NOGUCHI, Tsuyoshi; JP
Agent:
特許業務法人 安富国際特許事務所 YASUTOMI & ASSOCIATES; 大阪府大阪市淀川区宮原3丁目5番36号 5-36, Miyahara 3-chome, Yodogawa-ku, Osaka-shi, Osaka 5320003, JP
Priority Data:
2016-15788010.08.2016JP
Title (EN) COMPOSITION AND MOLDED ARTICLE
(FR) COMPOSITION ET ARTICLE MOULÉ
(JA) 組成物および成形品
Abstract:
(EN) Provided is a composition which has excellent heat resistance and provides a molded article that exhibits a small weight change when exposed to oxygen plasma and fluorine-based plasma in a semiconductor manufacturing process. The composition is characterized by containing a fluorine-containing polymer and a hyper-branched polymer of a cage-type silsesquioxane having a specific structure.
(FR) L'invention concerne une composition qui présente une excellente résistance à la chaleur et fournit un article moulé qui présente un faible changement de poids lorsqu'il est exposé à un plasma d'oxygène et à un plasma à base de fluor dans un procédé de fabrication de semi-conducteurs. La composition est caractérisée en ce qu'elle contient un polymère fluoré et un polymère hyper-ramifié d'un silsesquioxane de type cage ayant une structure spécifique.
(JA) 耐熱性に優れ、さらに半導体の製造工程で曝される酸素プラズマおよびフッ素系プラズマに対して重量変化が小さい成形品を与える組成物を提供する。含フッ素ポリマー、及び、特定の構造を有するかご型シルセスキオキサンのハイパーブランチポリマーを含むことを特徴とする組成物である。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)