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1. (WO2018029866) FORCE SENSOR

Pub. No.:    WO/2018/029866    International Application No.:    PCT/JP2016/075236
Publication Date: Fri Feb 16 00:59:59 CET 2018 International Filing Date: Tue Aug 30 01:59:59 CEST 2016
IPC: G01L 25/00
G01L 5/16
Applicants: TRI-FORCE MANAGEMENT CORPORATION
株式会社 トライフォース・マネジメント
Inventors: OKADA Kazuhiro
岡田 和廣
OKADA Miho
岡田 美穂
Title: FORCE SENSOR
Abstract:
This force sensor detects at least one component among components including forces in the respective axial directions in an XYZ three-dimensional coordinate system and moments about the respective axes, the force sensor comprising: a support body arranged on the XY plane; a deforming body joined to the support body; and a detection circuit that outputs an electric signal indicating a force applied to the deforming body. The deforming body includes: a first deforming part having a first spring constant; and a second deforming part having a second spring constant that is different from the first spring constant. The detection circuit outputs a first electric signal corresponding to the deformation of the first deforming part and a second electric signal corresponding to the deformation of the second deforming part, each electric signal corresponding to the applied force, and the detection circuit determines whether or not the force sensor is functioning normally on the basis of a change in ratio between the first electric signal and the second electric signal corresponding to the applied force.