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1. (WO2018028298) METHOD FOR MANUFACTURING ARRAY SUBSTRATE, ARRAY SUBSTRATE AND DISPLAY APPARATUS

Pub. No.:    WO/2018/028298    International Application No.:    PCT/CN2017/088200
Publication Date: Fri Feb 16 00:59:59 CET 2018 International Filing Date: Thu Jun 15 01:59:59 CEST 2017
IPC: H01L 21/84
H01L 27/12
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
Inventors: ZHANG, Bin
张斌
LIU, Chienhung
刘建宏
CHAN, Yucheng
詹裕程
SUN, Xuefei
孙雪菲
CAO, Zhanfeng
曹占锋
Title: METHOD FOR MANUFACTURING ARRAY SUBSTRATE, ARRAY SUBSTRATE AND DISPLAY APPARATUS
Abstract:
A method for manufacturing an array substrate, an array substrate and a display apparatus. The method comprises: forming on a base substrate (10) an entire opaque film layer (20); processing the film layer such that a transparent region (a) and an opaque region (b) are formed on the film layer, the opaque region corresponding to a channel region (c) of an active layer (40); and forming a thin film transistor on the processed film layer. By means of forming an entire opaque film layer and the transparent region and opaque region are formed on the film layer before the thin film transistor is formed, and therefore no segment difference occurs when depositing the other film layer on the entire film layer, and the other various bad problems arising from the segment difference is also avoided.