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1. (WO2018028244) TRANSPARENT CONDUCTIVE FILM, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
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Pub. No.: WO/2018/028244 International Application No.: PCT/CN2017/081648
Publication Date: 15.02.2018 International Filing Date: 24.04.2017
IPC:
C23C 14/08 (2006.01) ,C23C 14/35 (2006.01) ,H01B 1/08 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
08
Oxides
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
35
by application of a magnetic field, e.g. magnetron sputtering
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
B
CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
1
Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
06
mainly consisting of other non-metallic substances
08
oxides
Applicants: PEKING UNIVERSITY SHENZHEN GRADUATE SCHOOL[CN/CN]; Beida Zone, Shenzhen University Town, Xili Nanshan District Shenzhen, Guangdong 518055, CN
Inventors: PAN, Feng; CN
LIANG, Jun; CN
YANG, Xiaoyang; CN
LIN, Hai; CN
WU, Zhongzhen; CN
LIU, Yidong; CN
Agent: DHC IP ATTORNEYS; Suite 2201,Modern International Commercial Building,Cross of Fuhua Road and Jintian Road Futian District Shenzhen, Guangdong 518048, CN
Priority Data:
201610653622.309.08.2016CN
Title (EN) TRANSPARENT CONDUCTIVE FILM, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
(FR) FILM CONDUCTEUR TRANSPARENT, SON PROCÉDÉ DE PRÉPARATION ET SON APPLICATION
(ZH) 一种透明导电薄膜及其制备方法和应用
Abstract:
(EN) Disclosed are a transparent, conductive and doped titanium dioxide film, a preparation method therefor, and an application thereof. The transparent conductive film of the present application is a doped titanium dioxide film, wherein "doped" is ruthenium-doped as well as niobium- and/or tantalum-doped. According to the transparent conductive film of the present application, a titanium dioxide is doped with ruthenium, and is also doped with one or both of niobium and tantalum, so that the prepared doped titanium dioxide film has excellent electrical conductivity, good temperature resistance, and high light transmittance. Moreover, the transparent conductive film of the present application has low raw material costs and rich resources, and the preparation method therefor is also simple and easy to operate, thereby meeting needs of large-scale batch production, and laying a foundation for spread, application and research of the transparent conductive film.
(FR) Cette invention concerne un film de dioxyde de titane dopé, conducteur et transparent, son procédé de préparation, et une application de celui-ci. Le film conducteur transparent selon l'invention est un film de dioxyde de titane dopé, le terme "dopé" signifiant dopé au ruthénium ainsi que dopé au niobium et/ou au tantale. Dans ledit film conducteur transparent, un dioxyde de titane est dopé au ruthénium, et il est également dopé par l'un ou les deux parmi le niobium et le tantale, de sorte que le film de dioxyde de titane dopé préparé présente une excellente conductivité électrique, une bonne résistance aux températures extrêmes et une transmittance élevée de la lumière. De plus, le film conducteur transparent selon l'invention présente des coûts de matière première réduits et des ressources importantes, et son procédé de préparation est simple et facile à mettre en œuvre, de sorte à répondre aux besoins de la production en masse à grande échelle, et à poser les fondements pour la diffusion, l'application et la recherche dans le domaine des films conducteurs transparents.
(ZH) 本申请公开了一种掺杂二氧化钛透明导电薄膜及其制备方法和应用。本申请的透明导电薄膜为掺杂二氧化钛薄膜,其中,掺杂为钌掺杂,以及铌和/或钽掺杂。本申请的透明导电薄膜,在二氧化钛中掺杂钌,同时掺杂铌和钽中的一种或两种,使得制备的掺杂二氧化钛薄膜,导电性能优良,耐温性好,透光率高;并且,本申请的透明导电薄膜其原材料成本低廉资源丰富,其制备方法也简单易操作,能够满足大规模批量生产的需求,为透明导电薄膜的推广应用和研究奠定了基础。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)