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1. (WO2018026129) WATER COOLING TYPE SURFACE-WAVE PLASMA GENERATION APPARATUS
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/026129    International Application No.:    PCT/KR2017/007905
Publication Date: 08.02.2018 International Filing Date: 21.07.2017
IPC:
H01J 37/32 (2006.01)
Applicants: KOREA BASIC SCIENCE INSTITUTE [KR/KR]; 169-148, Gwahak-ro Yuseong-gu Daejeon 34133 (KR)
Inventors: YOU, Hyun Jong; (KR).
CHOO, Won Il; (KR)
Agent: NAM, Gun Pil; (KR).
CHA, Sang Yun; (KR).
PARK, Jong Soo; (KR)
Priority Data:
10-2016-0098303 02.08.2016 KR
Title (EN) WATER COOLING TYPE SURFACE-WAVE PLASMA GENERATION APPARATUS
(FR) APPAREIL DE GÉNÉRATION DE PLASMA À ONDES DE SURFACE DU TYPE À REFROIDISSEMENT PAR EAU
(KO) 수냉식 표면파 플라즈마 발생장치
Abstract: front page image
(EN)A water cooling type surface-wave plasma generation apparatus is disclosed. The water cooling type surface-wave plasma generation apparatus comprises: a waveguide for transmitting an electromagnetic wave; a dielectric pipe having a first end electromagnetically coupled to the waveguide so as to enable inflow of the electromagnetic wave transmitted inside the waveguide; a cooling jacket, which has a hollow pipe shape, encompasses all or a part of a length of a part of the dielectric pipe exposed to the outside of the waveguide such that an inner surface of the pipe comes into contact with an outer surface of the dielectric pipe, moves a cooling fluid, injected from the outside of the pipe, along the longitudinal direction and circumferential direction of the pipe, and includes a first cooling flow path located between the inner surface and the outer surface of the pipe; and a discharging gas injection unit connected to the dielectric pipe so as to enable a fluid to flow therebetween, and injecting a discharging gas into the dielectric pipe.
(FR)L'invention concerne un appareil de génération de plasma à ondes de surface du type à refroidissement par eau. L'appareil de génération de plasma à ondes de surface du type à refroidissement par eau comprend : un guide d'ondes permettant de transmettre une onde électromagnétique ; un tuyau diélectrique ayant une première extrémité couplée de façon électromagnétique au guide d'ondes de façon à permettre l'entrée de l'onde électromagnétique transmise à l'intérieur du guide d'ondes ; une chemise de refroidissement, en forme de tuyau creux, englobe tout ou partie d'une longueur d'une partie du tuyau diélectrique exposée à l'extérieur du guide d'ondes de sorte qu'une surface interne du tuyau vienne en contact avec une surface externe du tuyau diélectrique, déplace un fluide de refroidissement, injecté depuis l'extérieur du tuyau, le long de la direction longitudinale et de la direction circonférentielle du tuyau, et comprend un premier passage de refroidissement situé entre la surface interne et la surface externe du tuyau ; et une unité d'injection de gaz de décharge reliée au tuyau diélectrique de manière à permettre à un fluide de s'écouler entre ceux-ci, et injectant un gaz de décharge dans le tuyau diélectrique.
(KO)수냉식 표면파 플라즈마 발생장치가 개시된다. 수냉식 표면파 플라즈마 발생장치는 전자기파를 전송하는 도파관; 유전체관으로서, 상기 도파관 내에서 전송되는 전자기파의 유입이 가능하도록 상기 유전체관의 제1 단부가 상기 도파관과 전자파 커플링된 유전체관; 중공의 관 형태이고, 관의 내면이 상기 유전체관의 외면과 접촉하도록 상기 도파관의 외부로 노출되어 있는 상기 유전체관의 일부분의 길이 전체 또는 일부를 감싸고 있고, 관의 외부로부터 주입된 냉각유체를 관의 길이방향 및 원주방향을 따라 이동시키며 관의 내면 및 외면 사이에 위치하고 있는 제1 냉각유로를 포함하는 냉각자켓; 및 상기 유전체관과 유체 소통 가능하게 연결되어 상기 유전체관의 내부로 방전가스를 주입하는 방전가스 주입부를 포함하는 것을 특징으로 한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)