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1. (WO2018025849) CHARGED PARTICLE BEAM DEVICE AND SCANNING ELECTRON MICROSCOPE

Pub. No.:    WO/2018/025849    International Application No.:    PCT/JP2017/027864
Publication Date: Fri Feb 09 00:59:59 CET 2018 International Filing Date: Wed Aug 02 01:59:59 CEST 2017
IPC: H01J 37/04
H01J 37/141
H01J 37/18
H01J 37/20
H01J 37/28
Applicants: MATSUSADA PRECISION, INC.
松定プレシジョン株式会社
Inventors: KUMAMOTO, Kazuya
熊本 和哉
MATSUDA, Sadayoshi
松田 定好
Title: CHARGED PARTICLE BEAM DEVICE AND SCANNING ELECTRON MICROSCOPE
Abstract:
This charged particle beam device comprises an electron source (11) emitting a primary electron beam (12), an upper objective lens (18) and a lower objective lens (26) focusing the primary electron beam (12) emitted from the electron source (11) onto a sample, a sample stage (24) whereon the sample (23) is placed, and a shielding electrode (51) and an electric potential plate (22) allowing the primary electron beam (12) to pass therethrough. Disposed from the sample stage side are the shielding electrode (51) and the electric potential plate (22) in this order. An electric potential difference is applied between the sample stage (24) and the electric potential plate (22). An electric potential is applied to the shielding electrode (51) to mitigate the electric field arising in the sample (23) due to the electric potential difference.