Search International and National Patent Collections

1. (WO2018025756) IMPRINT DEVICE AND ARTICLE MANUFACTURING METHOD

Pub. No.:    WO/2018/025756    International Application No.:    PCT/JP2017/027354
Publication Date: Fri Feb 09 00:59:59 CET 2018 International Filing Date: Sat Jul 29 01:59:59 CEST 2017
IPC: H01L 21/027
B29C 59/02
Applicants: CANON KABUSHIKI KAISHA
キヤノン株式会社
Inventors: YAMAMOTO Kiyohito
山本 磨人
Title: IMPRINT DEVICE AND ARTICLE MANUFACTURING METHOD
Abstract:
This imprint device has: a processing part that forms an imprint material pattern on a substrate by using a mold; a chamber that houses the processing part and that has a first gate to which a first storage part that stores a substrate yet to be processed by the processing part is connected and a second gate to which a second storage part that stores the substrate processed by the processing part is connected; and a control part that prohibits the first gate from being opened until a prescribed time elapses after the substrate, on which the pattern has been formed by the processing part, has been stored in the second storage part and the second gate has been closed.