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1. (WO2018024871) MATCHING APPARATUS FOR SUBSTRATE CARRIERS

Pub. No.:    WO/2018/024871    International Application No.:    PCT/EP2017/069759
Publication Date: Fri Feb 09 00:59:59 CET 2018 International Filing Date: Sat Aug 05 01:59:59 CEST 2017
IPC: H01L 21/687
H01L 21/677
Applicants: MEYER BURGER (GERMANY) AG
Inventors: ZHAO, Jun
ANSORGE, Erik
Title: MATCHING APPARATUS FOR SUBSTRATE CARRIERS
Abstract:
The invention relates to an matching apparatus (1, 1’, 1’’) for a substrate carrier (2), wherein the substrate carrier (2) comprises openings (3) which are delimited by a plurality of webs (21, 22, 23, 24), each having at least one substrate support face (25), and also to the use of the matching apparatus (1, 1’, 1’’). The matching apparatus (1, 1’, 1’’) according to the invention is characterized in that it has at least one substrate support element (11, 11’, 11’’) which protrudes into at least one opening (3) of the substrate carrier (2) and has a substrate support face (12, 12’, 12’’), and is arranged in an intersection region of webs (21, 22, 23, 24) of the substrate carrier (2) such that the substrate support faces (25), which adjoin the substrate support face (12, 12’, 12’’) of the at least one substrate support element (11, 11’, 11’’), of the webs (21, 22, 23, 24), which are adjacent to the at least one substrate support element (11, 11’, 11’’), and the substrate support face (12, 12’, 12’’) of the at least one substrate support element (11, 11’, 11’’) of the matching apparatus (1, 1’, 1’’) form a closed substrate support face.