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1. (WO2018024707) TRANSPORTING SYSTEM AND PROCESSING SYSTEM FOR SUBSTRATES
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/024707 International Application No.: PCT/EP2017/069390
Publication Date: 08.02.2018 International Filing Date: 01.08.2017
IPC:
B65G 47/64 (2006.01) ,B65G 47/52 (2006.01) ,B65G 47/91 (2006.01) ,H01L 21/683 (2006.01) ,B65G 21/20 (2006.01) ,B65G 47/14 (2006.01) ,H01L 21/677 (2006.01) ,H01L 21/67 (2006.01) ,B65G 51/02 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47
Article or material-handling devices associated with conveyers; Methods employing such devices
52
Devices for transferring articles or materials between conveyers, i.e. discharging or feeding devices
64
Switching conveyers
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47
Article or material-handling devices associated with conveyers; Methods employing such devices
52
Devices for transferring articles or materials between conveyers, i.e. discharging or feeding devices
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47
Article or material-handling devices associated with conveyers; Methods employing such devices
74
Feeding, transfer, or discharging devices of particular kinds or types
90
Devices for picking-up and depositing articles or materials
91
incorporating pneumatic, e.g. suction, grippers
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
21
Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyers
20
Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements, or loads supported on moving surfaces
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47
Article or material-handling devices associated with conveyers; Methods employing such devices
02
Devices for feeding articles or materials to conveyers
04
for feeding articles
12
from disorderly-arranged article piles or from loose assemblages of articles
14
arranging or orientating the articles by mechanical or pneumatic means during feeding
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
51
Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
02
Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
Applicants:
ASYS AUTOMATISIERUNGSSYSTEME GMBH [DE/DE]; Benzstr. 10 89160 Dornstadt, DE
Inventors:
WAMSLER, Florian; DE
ARNOLD, Achim; DE
OPPELT, Klaus; DE
Agent:
CLARENBACH, Carl-Philipp; DE
GLEISS, Alf-Olav; DE
SCHRELL, Andreas; DE
SCHWAHN, Hartmut; DE
WOHLFAHRT, Jan; DE
KORDEL, Mattias; DE
DIETZ, Christopher; DE
Priority Data:
10 2016 214 184.801.08.2016DE
Title (EN) TRANSPORTING SYSTEM AND PROCESSING SYSTEM FOR SUBSTRATES
(FR) SYSTÈME DE TRANSPORT ET SYSTÈME D'USINAGE DE SUBSTRATS
(DE) TRANSPORTSYSTEM UND BEARBEITUNGSSYSTEM FÜR SUBSTRATE
Abstract:
(EN) The invention relates to a transporting system (1) for substrates (19), in particular wafers, solar cells, printed circuit boards or the like, having a first apparatus (4) which for retaining and transporting the substrates (19), said first apparatus having a gripping head (6), with at least one first bearing surface (11) on its underside (10) on which to position a substrate (19), and at least one suction device (8) for the suction attachment of the substrate (19) against the bearing surface (11), and having a second apparatus (5) for retaining and transporting the substrates (19), said second apparatus having at least one second bearing surface (18), on which a substrate (19) can be set down, and having a device (20) for moving the set-down substrate (19) from the second bearing surface (18) to the first bearing surface (11). Provision is made here for the device (20) to have at least one compressed-air nozzle (21), which is arranged beneath the second bearing surface (18) such that a compressed-air stream generated by it flows in the direction of a substrate (19) located on the second bearing surface (18), in order to raise the substrate (19) in the direction of the first bearing surface (11).
(FR) L'invention concerne un système de transport (1) destiné à des substrats (19), en particulier des tranches de semi-conducteurs, des cellules solaires, des plaquettes de circuits imprimés ou similaires. Le système de transport comporte un premier dispositif (4), destiné à maintenir et transporter les substrats (19), qui comporte une tête de préhension (11) pourvue sur son côté inférieur (10) d'au moins une première surface d'application (11) destinée à l'application d'un substrat (19) et au moins un moyen d'aspiration (8) destiné à aspirer le substrat (19) contre la surface d'application (11), et un deuxième dispositif (5), destiné à maintenir et transporter les substrats (19), qui comporte au moins une deuxième surface d'application (18) sur laquelle un substrat (19) peut être appliqué, et un moyen (20) destiné à déplacer le substrat appliqué (19) de la deuxième surface d'application (18) à la première surface d'application (11). Il est prévu de munir le moyen (20) d'au moins une buse d'air comprimé (21) disposée sous la deuxième surface d'application (18) de manière à ce qu'un flux d'air comprimé, généré par ladite buse, s'écoule en direction d'un substrat (19), placé sur la deuxième surface d'application, pour soulever le substrat (19) en direction de la première surface d'application (11).
(DE) Die Erfindung betrifft ein Transportsystem (1) für Substrate (19), insbesondere Wafer, Solarzellen, Leiterplatten oder dergleichen, mit einer ersten Vorrichtung (4) zum Halten und Transportieren der Substrate (19), die einen Greifkopf (6) mit zumindest einer ersten Auflagefläche (11) an seiner Unterseite (10) zum Auflegen eines Substrats (19) und zumindest eine Saugeinrichtung (8) zum Ansaugen des Substrats (19) gegen die Auflagefläche (11) aufweist, und mit einer zweiten Vorrichtung (5) zum Halten und Transportieren der Substrate (19), die zumindest eine zweite Auflagefläche (18) aufweist, auf welcher ein Substrat (19) ablegbar ist, und mit einer Einrichtung (20) zum Bewegen des abgelegten Substrats (19) von der zweiten Auflagefläche (18) zu der ersten Auflagefläche (11). Dabei ist vorgesehen, dass die Einrichtung (20) wenigstens eine Druckluftdüse (21) aufweist, die unterhalb der zweiten Auflagefläche (18) derart angeordnet ist, das ein durch sie erzeugter Druckluftstrom in Richtung eines auf der zweiten Auflagefläche (18) liegenden Substrats (19) strömt, um das Substrat (19) in Richtung der ersten Auflagefläche (11) anzuheben.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)