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1. (WO2018024416) A POSITIONING SYSTEM, METHOD TO POSITION, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Pub. No.:    WO/2018/024416    International Application No.:    PCT/EP2017/066101
Publication Date: Fri Feb 09 00:59:59 CET 2018 International Filing Date: Fri Jun 30 01:59:59 CEST 2017
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: BUTLER, Hans
SYMENS, Wim
JANSEN, Bas
Title: A POSITIONING SYSTEM, METHOD TO POSITION, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Abstract:
The invention relates to a positioning system comprising: - a first body; - a second body; - an actuator arranged between the first body and the second body to position the first body relative to the second body; and wherein the actuator comprises a first piezoelectric actuator and a second piezoelectric actuator arranged in series, wherein the first piezoelectric actuator has a first hysteresis, wherein the second piezoelectric actuator has a second hysteresis smaller than the first hysteresis, wherein the second piezoelectric actuator has a positioning range at least equal to the first hysteresis.