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1. (WO2018022370) CLEANING SOLUTION MIXING SYSTEM WITH ULTRA-DILUTE CLEANING SOLUTION AND METHOD OF OPERATION THEREOF

Pub. No.:    WO/2018/022370    International Application No.:    PCT/US2017/042745
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Thu Jul 20 01:59:59 CEST 2017
IPC: G03F 7/20
Applicants: APPLIED MATERIALS, INC.
Inventors: RASTEGAR, Abbas
Title: CLEANING SOLUTION MIXING SYSTEM WITH ULTRA-DILUTE CLEANING SOLUTION AND METHOD OF OPERATION THEREOF
Abstract:
Disclosed are a cleaning solution mixing system, a tool and a method of operation thereof, including an ultrapure water source for providing ultrapure water; an ammonia filter for filtering ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water.