Search International and National Patent Collections

1. (WO2018021562) MICROBUBBLE CLEANING DEVICE AND MICROBUBBLE CLEANING METHOD

Pub. No.:    WO/2018/021562    International Application No.:    PCT/JP2017/027551
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Sat Jul 29 01:59:59 CEST 2017
IPC: H01L 21/304
G02F 1/13
H01L 21/027
Applicants: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
パナソニックIPマネジメント株式会社
Inventors: HIDAKA Yoshiharu
日高 義晴
YAMAMOTO Hiroshi
山本 寛
Title: MICROBUBBLE CLEANING DEVICE AND MICROBUBBLE CLEANING METHOD
Abstract:
There are cases in which even when fine bubbles are to be used for cleaning a semiconductor or an electronic device, the fine bubbles are stably present for a long time and do not therefore efficiently collapse on the surface of an object being cleaned. This microbubble cleaning device is characterized by having: a microbubble generating device which generates microbubbles in a cleaning liquid and thereby generates a bubble cleaning liquid; a spontaneous bubble-collapse device which generates a short-life bubble cleaning liquid by decreasing the life of the microbubbles in the cleaning liquid; and a cleaning bath in which the short-life bubble cleaning liquid and an object being cleaned are brought into contact. The microbubble cleaning device sets, in advance, the life of microbubbles to be short and therefore causes the microbubbles to be spontaneously collapse upon reaching the object being cleaned, thereby increasing cleaning capability.